Micro and Nano Machined Electrometers

This book reviews advances in cutting-edge micro-/nano-electrometers, and discusses the technological challenges involved in their practical implementation. The detection of electrostatic charge has a wide range of applications in ionization chambers, bio-analyte and aerosol particle instruments, mass spectrometers, scanning tunneling microscopes, and even quantum computers. Designing micro-/nano-electrometers (also known as charge sensors) for electrometry is considered vital because of the charge sensitivity and resolution issues at micro-/nano-scales. The remarkably dynamic microelectromechanical systems (MEMSs)/nanoelectromechanical systems (NEMSs), and advances in solid-state electronics, hold considerable potential for the design and fabrication of extremely sensitive charge sensors.

Introduction.- Noises in electrometers.- Commercial solid-state electrometer.- Mesoscopic SET electrometer.- NEMS based resonant electrometer.- MEMS based resonant electrometer .- MEMS based resonant electrometer.- Vibrating-reed electrometer.- Vibrating-reed electrometer.- Electrometer applications.

Dr Yong Zhu is a full member of Queensland Micro- and Nanotechnology Centre (QMNC), and a senior lecturer in Electrical and Electronic Engineering at Griffith University, Australia. In 2005, He was conferred his PhD degree in Microelectronics and Solid State Electronics from Peking University, China. In 2006, Dr Zhu received a Postdoctoral Fellowship from the Department of Engineering, University of Cambridge, UK, where he developed high-precision MEMS electrometer, mass balance and radio frequency resonator. From 2008 to 2011, he was a Research Academic at the School of Electrical Engineering and Computer Science, the University of Newcastle, Australia.
His research focuses on MEMS and NEMS devices, including MEMS electrometer, SiC-based sensor, power harvester, nanopositioner, microactuator, biomedical sensors, radio frequency devices, etc.