Cluster Beam Synthesis of Nanostructured Materials

This book supplies a systematic description of the preparation, characterization, and manipulation of cluster beams for the synthesis of nanocrystalline materials. It addresses all issues relevant to the realization of nanophase structures, providing an excellent introduction for scientists working in different fields. Particular emphasis is placed on using the technique for nanostructured materials and on explaining the role of cluster beams within the context of other experimental techniques in surface-science.

1. Introduction.- 2. Molecular Beams and Cluster Nucleation.- 2.1 Molecular Beams.- 2.1.1 Continuous Effusive Beams.- 2.1.2 Continuous Supersonic Beams.- 2.1.3 Pulsed Beams.- 2.2 Nucleation and Aggregation Processes.- 2.2.1 Classical Theory.- 2.2.2 Homogeneous Nucleation by Monomer Addition.- 2.2.3 Homogeneous Nucleation by Aggregation.- 2.2.4 Nucleation of Clusters in Beams.- 2.2.5 Semi-empirical Approach to Clustering in Free Jets.- 3. Cluster Sources.- 3.1 Vaporization Methods.- 3.1.1 Joule Heating.- 3.1.2 Plasma Generation for Cluster Production.- 3.1.3 Laser Vaporization.- 3.1.4 Glow and Arc Discharges.- 3.2 Continuous Sources.- 3.2.1 Effusive Joule-Heated Gas Aggregation Sources.- 3.2.2 Magnetron Plasma Sources.- 3.2.3 Supersonic Sources.- 3.3 Pulsed Sources.- 3.3.1 Pulsed Valves.- 3.3.2 Laser Vaporization Sources.- 3.3.3 Arc Pulsed Sources.- 4. Characterization and Manipulation of Cluster Beams.- 4.1 Mass Spectrometry.- 4.1.1 Quadrupole Mass Spectrometry.- 4.1.2 Time-of-Flight Mass Spectrometry.- 4.1.3 Retarding Potential Mass Spectrometry.- 4.2 Detection Methods.- 4.2.1 Ionization of Clusters.- 4.2.2 Charged Cluster Detection.- 4.2.3 Cluster Beam Characterization.- 4.3 Cluster Selection and Manipulation.- 4.3.1 Size and Energy Selection.- 4.3.2 Quadrupole Filter.- 4.3.3 Separation of Gas Mixtures in Supersonic Beams.- 5. Thin Film Deposition and Surface Modification by Cluster Beams.- 5.1 Kinetic Energy Regimes.- 5.2 Diffusion and Coalescence of Clusters on Surfaces.- 5.3 Low-Energy Deposition.- 5.3.1 Cluster Networks and Porous Films.- 5.3.2 Composite Nanocrystalline Materials.- 5.4 High-Energy Deposition.- 5.4.1 Implantation, Sputtering, Etching.- 5.4.2 Thin Film Formation.- 6. Outlook and Perspectives.- 6.1 Cluster Beam Processing of Surfaces.- 6.2 Nanostructured Materials Synthesis.- 6.3 Perspectives.- References.