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This book thoroughly reviews the present knowledge on silicon micromechanical transducers and addresses emerging and future technology challenges. Readers will acquire a solid theoretical and practical background that will allow them to analyze the key performance aspects of devices, critically judge a fabrication process, and then conceive and design new ones for future applications. Envisioning a future complex versatile microsystem, the authors take inspiration from Richard Feynman’s visionary talk “There is Plenty of Room at the Bottom” to propose that the time has come to see silicon sensors as part of a “Feynman Roadmap” instead of the “More-than-Moore” technology roadmap. The sharing of the author’s industrially proven track record of development, design, and manufacturing, along with their visionary approach to the technology, will allow readers to jump ahead in their understanding of the core of the topic in a very effective way. Students, researchers, engineers, and technologists involved in silicon-based sensor and actuator research and development will find a wealth of useful and groundbreaking information in this book.
Ernesto Lasalandra is R&D General Manager in the Analog, MEMS & Sensor Group at STMicroelectronics (ST). He graduated with a degree in Electronic Engineering from the University of Pavia, Italy, and then joined ST. He has piloted successful stories with microphones, magnetic sensors, environmental sensors, mirrors, actuators, and touch sensors., and has published numerous papers and publications on MEMS technology.
Flavio Francesco Villa is a member of Technical Staff in the Analog, MEMS & Sensor Group at STMicroelectronics (ST), where he is also a member of the ST Patents Committee concerning the field of Silicon Sensors and Actuators, Package, and Smart Power Technologies. He received the “Laurea” degree (Summa cum Laude) in Solid State Physics from the University of Milan. At the invitation of the University of Pavia, he has held educational seminars on micro-sensors, integrated microcircuits, and MEMS since 2004. He is a member of the Electrochemical Society and is the author or co-author of several papers and more than eighty international patents. He was a recipient of three exceptional patent awards from the STMicroelectronics Research Division.
Sarah Zerbini is MEMS Design Director in the Analog, MEMS & Sensor Group at STMicroelectronics (ST). She received an MS degree in solid-state physics from Parma University before joining ST, where she has led the design of accelerometers, gyroscopes, magnetic sensors, mirrors, and actuators for the automotive and consumer market. She has authored more than 20 publications and 30 patents in the fields of micromachining technology, MEMS design, modeling, and characterization.
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