Nanoimprinting and its Applications

Nanoimprinting has grown rapidly since it was proposed in 1995 by Prof. Chou. Now machines, resins, and molds for nanoimprinting are commercially available worldwide. The application fields of nanoimprinting are expanding to not only electronics but also optics, biology, and energy because nanoimprinting is a simple and convenient method for nanofabrication, and some devices are now being mass-produced. In the near future, the application of nanoimprinting in display and semiconductor fields is expected. This book explains the fundamentals of nanoimprinting in terms of materials, processes, and machines. It also describes the applications of nanoimprinting in optics, biology, energy, and electronics. In addition, it includes as many practical examples of nanoimprinting as possible. The fundamentals will help advanced undergraduate and graduate students understand nanoimprinting. The examples will be useful for both researchers working in nanoimprinting for the first time and engineers involved in research and development of various devices using nanostructures.

1. Introduction 2. Template Technology 3. Thermal Nanoimprinting 4. Photo Nanoimprinting 5. Room-temperature Nanoimprinting Shinji Matsui 6. Reversal and hybrid nanoimprinting Yoshihiko Hirai 7. Simulation Yoshihiko Hirai 8. Applications 9. Evaluation Makoto Okada

Akihiro Miyauchi is a nanotechnology researcher currently working as a professor at Tokyo Medical and Dental University, Japan. He received his bachelor’s in theoretical physics from the Tokyo University of Science and his master’s and PhD from the Tokyo Institute of Technology. He was a visiting scientist at the Massachusetts Institute of Technology (MIT) in 1995–1996 and chief researcher at Hitachi Ltd. for 10 years, where he led four national projects on nanoimprinting and biomimetics. Prof. Miyauchi is session chair of the International Microprocesses and Nanotechnology Conference and a member of the International Conference on Nanoimprint and has been an expert advisor for the Ministry of Education and New Energy and Industrial Technology Development Organization (NEDO), Japan. He has developed high-speed integrated circuits for optical communication using selective CVD, cell cultivation plates for regenerative medical, fluid control machines, and fuel cells. His current research involves biomimetics for fluid control and antibiofouling using informatics.