Nano- and Micro-Electromechanical Systems Fundamentals of Nano- and Microengineering, Second Edition

Society is approaching and advancing nano- and microtechnology from various angles of science and engineering. The need for further fundamental, applied, and experimental research is matched by the demand for quality references that capture the multidisciplinary and multifaceted nature of the science. Presenting cutting-edge information that is applicable to many fields, Nano- and Micro-Electromechanical Systems: Fundamentals of Nano and Microengineering, Second Edition builds the theoretical foundation for understanding, modeling, controlling, simulating, and designing nano- and microsystems. The book focuses on the fundamentals of nano- and microengineering and nano- and microtechnology. It emphasizes the multidisciplinary principles of NEMS and MEMS and practical applications of the basic theory in engineering practice and technology development. Significantly revised to reflect both fundamental and technological aspects, this second edition introduces the concepts, methods, techniques, and technologies needed to solve a wide variety of problems related to high-performance nano- and microsystems. The book is written in a textbook style and now includes homework problems, examples, and reference lists in every chapter, as well as a separate solutions manual. It is designed to satisfy the growing demands of undergraduate and graduate students, researchers, and professionals in the fields of nano- and microengineering, and to enable them to contribute to the nanotechnology revolution.

NANOTECHNOLOGY AND MICROTECHNOLOGY (NANO- AND MICRO- SCIENCE, ENGINEERING AND TECHNOLOGY), AND BEYOND Introduction and Overview: From Micro- to Nano- and Beyond to Stringo-Scale Introductory Definitions to the Subjects Current Developments and Needs for Coherent Revolutionary Developments Societal Challenges and Implications NANO- AND MICROSCALE SYSTEMS, DEVICES, AND STRUCTURES Sizing Features: From Micro- to Nano-, and from Nano- to Stringo-Scale MEMS and NEMS Definitions Introduction to Taxonomy of Nano- and Microsystem Synthesis and Design Introduction to Design and Optimization of Nano- and Microsystems in the Behavioral Domain NANO- AND MICROSYSTEMS: CLASSIFICATION AND CONSIDERATION Biomimetics, Biological Analogies,and Design of NEMS and MEMS Micro- and Nanoelectromechanical Systems: Scaling Laws and Mathematical Modeling MEMS Examples and MEMS Architectures Introduction to Microfabrication and Micromachining FUNDAMENTALS OF MICROFABRICATION AND MEMS FABRICATION TECHNOLOGIES Introduction and Description of Basic Processes in Microfabrication Microfabrication and Micromachining of ICs, Microstructures, and Microdevices MEMS Fabrication Technologies DEVISING AND SYNTHESIS OF NEMS AND MEMS Motion Nano- and Microdevices: Synthesis and Classification Microaccelerometers as Microelectromechanical Microdevices Optimization with Application to Synthesis and Classification Solver Nanoengineering Bioinformatics and Its Application MODELING OF MICRO- AND NANOSCALE ELECTROMECHANICAL SYSTEMS AND DEVICES Introduction to Modeling, Analysis, and Simulation Basic Electromagnetics with Applications to MEMS and NEMS Model Developments of Micro- and Nanoactuators Using Electromagnetics Classical Mechanics and Its Application to MEMS Equations of Motions Direct-Current Micromachines Simulation of MEMS in the MATLAB Environment with Examples Induction Micromachines Synchronous Micromachines Permanent-Magnet Stepper Micromotors Piezotransducers Modeling of Electromagnetic Radiating Energy Microdevices Thermodynamics, Thermoanalysis, and Heat Equation QUANTUM MECHANICS AND ITS APPLICATIONS Atomic Structures and Quantum Mechanics Molecular and Nanostructure Dynamics Quantum Mechanics and Energy Bands MOLECULAR AND CARBON NANOELECTRONICS Past, Current, and Future of Electronics with Prospects for 2020 and Beyond Fundamentals Carbon Nanotubes Carbon-Based Nanoelectronics and Three-Dimensional Nano-ICs CONTROL OF MEMS AND NEMS Continuous-Time and Discrete-Time MEMS Analog Control of MEMS Using Transfer Functions The Hamilton-Jacobi Theory and Optimal Control of MEMS and NEMS Sliding Mode Control of MEMS and NEMS Constrained Control of Nonlinear MEMS and NEMS Optimization of Microsystems Using Nonquadratic Performance Functionals Hamilton-Jacobi Theory and Quantum Mechanics Lyapunov Stability Theory in Analysis and Control of MEMS and NEMS Digital Control of MEMS and NEMS EXAMPLES IN SYNTHESIS, ANALYSIS, DESIGN AND FABRICATION OF MEMS Introduction Analysis of Energy Conversion and MEMS Performance from Materials and Fabrication Viewpoints Analysis of Translational Microtransducers Single-Phase Reluctance Micromotors: Modeling, Analysis, and Control Microfabrication Topics Magnetization Dynamics of Thin Films Microstructures and Microtransducers with Permanent-Magnet: Micromirror Actuators Reluctance Electromagnetic Micromotors Micromachined Polycrystalline Silicon Carbide Micromotors Axial Electromagnetic Micromotors Cognitive Computer-Aided Design of MEMS

Sergey Edward Lyshevski