Micro Electro Mechanical System (MEMS) Technology for Multifaceted Applications

This book details simple methodology for the realization of the practical micro devices employed in general applications. The book brings out practical concept along with process details associated with the device realization. The micro device fabrication technique is similar to MEMS and the application and methodologies are compatible to standard CMOS technologies. This book covers basic of wafer, general micro devices such as micro-heater, temperature sensor, humidity sensor, gas sensor, pyro-device along with associated characterization, integration and assembly aspects. This book provides basic overview and discusses practical aspects with characterization data. This book is targeted for the beginners and researchers providing insight into the practical aspects of this technology.

Role of contamination.- Wafer Criteria.- Micromachined Sensors: An overview.- Fabrication.- Thin film stress.- Micro devices: Planar Heater.- Critical aspects.

Dr. Kamaljeet Singh, joined U R Rao Satellite Centre in Nov 1999 and worked in the area of RF receiver for satellite as designer. He contributed in various capacity and areas at U R Rao satellite centre notably realization and production of satellite transponders, Head of central fabrication facility responsible for flight cards fabrication. He was head of MEMS Development Division in SCL (2010-2015) responsible for the re-establishment of 6” fab-line responsible for the realization of various sensors.He was Group Director of HMC group from 2020-2023 where he was involved in development of HMCs and MIC/MMIC circuits. Since December 2023 he was heading SCL unit of MeitY. He is Fellow of IETE, Fellow of Punjab Academy of sciences, Life member of ASI & IMAPS and senior member of IEEE. He has published more than 200technical articles in various journals/conferences and has written various technical books. He was awarded by IETE, INAE, and ISRO for his technical contributions.

Ayan Karmakar received his M.Tech (Electronics & Telecom Engineering) degree from NIT-Durgapur. Currently he is working in SCL, Chandigarh as a Scientist-SF . His research interests include design and development of various  passive microwave integrated circuits and antennae using silicon based MIC,   RF-MEMS and THz-technology. He has authored one technical book named ‘Si- RF Technology’ (Springer-2019) and co-authored another book titled ‘Printed Antennas for Future Generation Wireless   Communication and Healthcare’ (CRC Publication (2023)’. He has more than 45  publications in refereed journals and conferences, He serves as a reviewer in top tier international journals, like- IEEE Access, RF-MiCAE, Springer, EJAET, etc. He is the Fellow of IETE and life member of Indian Science Congress Association and ISSE.