Micro Electro Mechanical System Design

Micro Electro Mechanical System Design presents a unified treatment of all micro electro mechanical system (MEMS) design procedures. The author focuses on the complete process required for designing and developing MEMS. Instead of focusing on only the detailed engineering and physics underlying a MEMS device, such as a gyroscope or fluidic device, this book looks at the entire process that a MEMS design engineer must consider in order to make informed technical decisions. The chapters answer important questions such as: What fabrication process do I use? Will this design approach produce a device that can be reliable and have a good yield? What are the packaging and assembly requirements?

It is challenging at best to find a resource that provides the breadth of information necessary to develop a successful micro electro mechanical system (MEMS) design. Micro Electro Mechanical System Design is that resource. It is a comprehensive, single-source guide that explains the design process by illustrating the full range of issues involved, how they are interrelated, and how they can be quickly and accurately addressed. The materials are presented in logical order relative to the manner a MEMS designer needs to apply them. For example, in order for a project to be completed correctly, on time, and within budget, the following diverse yet correlated issues must be attended to during the initial stages of design and development:Understanding the fabrication technologies that are available Recognizing the relevant physics involved for micron scale devicesConsidering implementation issues applicable to computer aided design Focusing on the engineering details and the subsequent evaluation testing Maintaining an eye for detail regarding both reliability and packaging These issues are fully addressed in this book, along with questions and problems at the end of each chapter that promote review and further contemplation of each topic. In addition, the appendices offer information that complement each stage of project design and development.

Table of INTRODUCTIONHistorical PerspectiveThe Development of MEMS TechnologyMEMS: Present and FutureMEMS Challenges The Aim of This BookQuestionsReferencesFABRICATION PROCESSESMaterials Starting Material - SubstratesPhysical Vapor Deposition (PVD)Chemical Vapor Deposition (CVD)Etching ProcessesPatterningWafer BondingAnnealingChemical Mechanical Polishing (CMP)Material DopingSummaryQuestionsReferencesMEMS TECHNOLOGIES Bulk MicromachiningLIGASacrificial Surface MicromachiningIntegration of Electronics and MEMS Technology (IMEMS) Technology CharacterizationAlternative MEMS MaterialsSummaryQuestionsReferencesSCALING ISSUES FOR MEMSScaling of Physical SystemsComputational Issues of ScaleFabrication Issues of ScaleMaterial Issues Newly Relevant Physical PhenomenaSummaryQuestions ReferencesDESIGN REALIZATION TOOLS FOR MEMSLayoutSUMMiT™ Technology LayoutDesign RulesStandard ComponentsMEMS VisualizationMEMS AnalysisSummaryQuestionsReferencesELECTROMECHANICS Structural MechanicsDampingElectrical System DynamicsQuestionsReferencesMODELING AND DESIGN Design Synthesis ModelingLagrange's EquationsNumerical ModelingDesign UncertaintyProblemsReferencesMEMS SENSORS AND ACTUATORS MEMS ActuatorsMEMS SensingQuestionsReferencesPACKAGING Packaging Process StepsPackaging Case StudiesSummaryQuestionsReferencesRELIABILITY Reliability Theory and TerminologyEssential Aspects of Probability and Statistics for ReliabilityReliability ModelsMEMS Failure MechanismsMeasurement Techniques for MEMS Operational, Reliability and Failure Analysis TestingMEMS Reliability and DesignMEMS Reliability Case StudiesSummaryQuestionsReferencesAPPENDIXGlossaryPrefixesMicro-MKS ConversionsPhysical ConstantsMaterial PropertiesStiffness Coefficients of Frequently Used MEMS FlexuresCommon MEMS Cross-Section PropertiesDesign Synthesis Software and Files

James J. Allen