Handbook of Nanofabrication

Many of the devices and systems used in modern industry are becoming progressively smaller and have reached the nanoscale domain. Nanofabrication aims at building nanoscale structures, which can act as components, devices, or systems, in large quantities at potentially low cost. Nanofabrication is vital to all nanotechnology fields, especially for the realization of nanotechnology that involves the traditional areas across engineering and science.

• Includes chapters covering the most important Nanofabrication techniques, which aids comprehensive understanding of the latest manufacturing technologies encountered in the field of nano-level manufacturing which is essential for preparing for advanced study and application in nanofabrication techniques by enabling thorough understanding of the entire nanofabrication process as it applies to advanced electronic and related manufacturing technologies.
• Each chapter covers a nanofabrication technique comprehensively, which allows the reader to learn to produce nanometer-level products as well as collect, process, and analyze data, improve process parameters, and how to assist engineers in research, development and manufacture of the same.

• Includes contributions from recognized experts from around the globe, making the reader aware of variations in similar techniques applied in different geographical locations and is better positioned to establish all possible global applications.

Gary Wiederrecht is the Group Leader of the Nanophotonics Group in the Center for Nanoscale Materials at Argonne National Laboratory. His research interests center on the photochemistry and photophysics of nanoparticles and periodic assemblies, hybrid nanostructures, photochemical energy conversion, and non-linear optical responses resulting from photoinduced charge separation. His experimental expertise is in the areas of ultrafast optical spectroscopy and scanning probe microscopy, including near-field scanning optical microscopy. He has received an R&D100 award, the Department of Energy Young Scientist Award, and the Presidential Early Career Award for Scientists and Engineers. He has authored or co-authored approximately 80 peer-reviewed research articles, and works collaboratively with scientists around the world. He enjoys traveling, nature, and spending time with his family.

Chemist, Group Leader, Nanophotonics Group

Argonne National Laboratory

Chemistry Division, E161

9700 South Cass Avenue

Argonne, IL 60439-4831