Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set THREE-VOLUME SET

Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised and updated the new edition of this perennial bestseller has been expanded to three volumes, reflecting the substantial growth of this field. It includes a wealth of theoretical and practical information on nanotechnology and NEMS and offers background and comprehensive information on materials, processes, and manufacturing options. The first volume offers a rigorous theoretical treatment of micro- and nanosciences, and includes sections on solid-state physics, quantum mechanics, crystallography, and fluidics. The second volume presents a very large set of manufacturing techniques for micro- and nanofabrication and covers different forms of lithography, material removal processes, and additive technologies. The third volume focuses on manufacturing techniques and applications of Bio-MEMS and Bio-NEMS. Illustrated in color throughout, this seminal work is a cogent instructional text, providing classroom and self-learners with worked-out examples and end-of-chapter problems. The author characterizes and defines major research areas and illustrates them with examples pulled from the most recent literature and from his own work.

Volume IIntroductionHistorical Note: The Ascent of Silicon, MEMS, and NEMSCrystallographyQuantum Mechanics and the Band Theory of SolidsSilicon Single Crystal Is Still KingPhotonicsFluidicsElectrochemical and Optical Analytical Techniques IndexVolume IIPart I: LithographyIntroduction to Part I Photolithography Next-Generation Lithographies and Lithography Research Part II: Pattern Transfer with Subtractive TechniquesIntroduction to Part II Dry Etching Wet Chemical Etching and Wet Bulk MicromachiningPools as Tools Thermal Energy-Based Removing MechanicalEnergy-Based Removing Part III: Pattern Transfer with Additive TechniquesIntroduction to Part IIIPhysical and Chemical Vapor DepositionThin Film Properties and Surface MicromachiningChemical, Photochemical, and Electrochemical Forming Techniques Thermal Energy-Based Forming TechniquesThermoforming 10 Micromolding TechniquesLIGA IndexVolume IIIPart I: From Traditional Manufacturing to NanotechnologyIntroduction to Part INonlithography-Based (Traditional) and Lithography-Based (Nontraditional) Manufacturing ComparedNature as an Engineering Guide: BiomimeticsNanotechnology: Top-Down and Bottom-Up Manufacturing Approaches ComparedPackaging, Assembly, and Self-AssemblySelected Materials and Processes for MEMS and NEMS6 Metrology and MEMS/NEMS Modeling 285Part II: Scaling Laws, Actuators, and Power and Brains in Miniature DevicesIntroduction to Part IIScaling LawsActuatorsPower and Brains in Miniature DevicesPart III: Miniaturization ApplicationIntroduction to Part IIIMEMS and NEMS ApplicationsIndex

Marc J. Madou, University of California, Irvine USA.