Scanning Electron Microscopy

TRAMA

Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interactions. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.

SOMMARIO

Electron Optics of a Scanning Electron Microscope.- Electron Scattering and Diffusion.- Emission of Backscattered and Secondary Electrons.- Electron Detectors and Spectrometers.- Image Contrast and Signal Processing.- Electron-Beam-Induced Current and Cathodoluminescence.- Special Techniques in SEM.- Crystal Structure Analysis by Diffraction.- Elemental Analysis and Imaging with X-Rays.

ALTRE INFORMAZIONI

• Condizione: Nuovo
• ISBN: 9783540639763
• Collana: Springer Series in Optical Sciences
• Dimensioni: 235 x 155 mm
• Formato: Copertina rigida
• Illustration Notes: XIV, 529 p.
• Pagine Arabe: 529
• Pagine Romane: xiv